Automatic Chemical Process Line
For Solar PV & Semiconductor Wafers
FAMPL Wet Process Lines are most suitable for all types of Batch Type Fully Auto with MMI for Wafer processing activity in Semi Conductor, MEMS & Solar PV wafer processing Industry.
The salient features of the line are as follows:
- 1PVDF/ TEFLON Tanks for all Critical Chemistry Baths.
- Laminar flow hood suitable for clean room.
- Ultrasonic unit for cleaning bath.
- Virgin based Quartz, (Boron free) process vessel for photo resist stripping bath.
- Number of process tanks as per customer requirement and process.
- Tanks can be easily added for expansion.
- SS316 Grade sink will be provided for general purpose cleaning.
- Accessories like DI water spray gun and the Nitrogen spray gun will be provided.
- All the controls through PLC and MMI of Mitsubishi / Omron make.
- Custom-built lines to suit individual customer needs
